{
"Summary": {
  "Slices": 31,
  "InitialPositionList": [
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56039.944,
          -5028.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos0_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56318.472,
          -5028.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos0_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56597,
          -5028.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos0_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56875.528,
          -5028.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos0_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          57154.056,
          -5028.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos0_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56039.944,
          -4749.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos0_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56318.472,
          -4749.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos0_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56597,
          -4749.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos0_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56875.528,
          -4749.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos0_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          57154.056,
          -4749.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos0_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56039.944,
          -4471
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos0_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56318.472,
          -4471
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos0_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56597,
          -4471
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos0_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56875.528,
          -4471
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos0_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          57154.056,
          -4471
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos0_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56039.944,
          -4192.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos0_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56318.472,
          -4192.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos0_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56597,
          -4192.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos0_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56875.528,
          -4192.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos0_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          57154.056,
          -4192.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos0_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56039.944,
          -3913.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos0_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56318.472,
          -3913.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos0_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56597,
          -3913.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos0_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56875.528,
          -3913.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos0_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          57154.056,
          -3913.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos0_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          56737.944,
          933.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos1_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57016.472,
          933.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos1_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57295,
          933.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos1_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57573.528,
          933.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos1_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57852.056,
          933.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos1_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          56737.944,
          1212.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos1_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57016.472,
          1212.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos1_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57295,
          1212.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos1_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57573.528,
          1212.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos1_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57852.056,
          1212.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos1_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          56737.944,
          1491
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos1_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57016.472,
          1491
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos1_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57295,
          1491
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos1_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57573.528,
          1491
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos1_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57852.056,
          1491
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos1_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          56737.944,
          1769.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos1_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57016.472,
          1769.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos1_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57295,
          1769.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos1_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57573.528,
          1769.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos1_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57852.056,
          1769.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos1_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          56737.944,
          2048.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos1_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57016.472,
          2048.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos1_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57295,
          2048.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos1_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57573.528,
          2048.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos1_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57852.056,
          2048.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos1_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56459.944,
          19329.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos2_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56738.472,
          19329.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos2_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57017,
          19329.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos2_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57295.528,
          19329.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos2_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57574.056,
          19329.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos2_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56459.944,
          19608.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos2_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56738.472,
          19608.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos2_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57017,
          19608.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos2_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57295.528,
          19608.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos2_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57574.056,
          19608.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos2_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56459.944,
          19887
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos2_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56738.472,
          19887
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos2_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57017,
          19887
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos2_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57295.528,
          19887
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos2_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57574.056,
          19887
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos2_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56459.944,
          20165.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos2_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56738.472,
          20165.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos2_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57017,
          20165.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos2_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57295.528,
          20165.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos2_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57574.056,
          20165.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos2_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56459.944,
          20444.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos2_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56738.472,
          20444.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos2_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57017,
          20444.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos2_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57295.528,
          20444.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos2_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57574.056,
          20444.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos2_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          56789.944,
          26393.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos3_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57068.472,
          26393.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos3_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57347,
          26393.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos3_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57625.528,
          26393.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos3_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57904.056,
          26393.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos3_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          56789.944,
          26672.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos3_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57068.472,
          26672.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos3_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57347,
          26672.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos3_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57625.528,
          26672.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos3_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57904.056,
          26672.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos3_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          56789.944,
          26951
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos3_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57068.472,
          26951
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos3_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57347,
          26951
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos3_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57625.528,
          26951
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos3_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57904.056,
          26951
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos3_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          56789.944,
          27229.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos3_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57068.472,
          27229.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos3_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57347,
          27229.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos3_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57625.528,
          27229.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos3_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57904.056,
          27229.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos3_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          56789.944,
          27508.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos3_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57068.472,
          27508.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos3_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57347,
          27508.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos3_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57625.528,
          27508.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos3_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57904.056,
          27508.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos3_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          64794.944,
          27725.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos4_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65073.472,
          27725.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos4_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65352,
          27725.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos4_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65630.528,
          27725.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos4_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65909.056,
          27725.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos4_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          64794.944,
          28004.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos4_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65073.472,
          28004.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos4_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65352,
          28004.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos4_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65630.528,
          28004.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos4_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65909.056,
          28004.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos4_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          64794.944,
          28283
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos4_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65073.472,
          28283
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos4_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65352,
          28283
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos4_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65630.528,
          28283
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos4_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65909.056,
          28283
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos4_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          64794.944,
          28561.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos4_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65073.472,
          28561.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos4_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65352,
          28561.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos4_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65630.528,
          28561.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos4_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65909.056,
          28561.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos4_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          64794.944,
          28840.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos4_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65073.472,
          28840.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos4_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65352,
          28840.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos4_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65630.528,
          28840.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos4_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65909.056,
          28840.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos4_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          64932.944,
          21470.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos5_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65211.472,
          21470.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos5_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65490,
          21470.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos5_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65768.528,
          21470.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos5_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          66047.056,
          21470.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos5_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          64932.944,
          21749.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos5_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65211.472,
          21749.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos5_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65490,
          21749.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos5_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65768.528,
          21749.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos5_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          66047.056,
          21749.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos5_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          64932.944,
          22028
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos5_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65211.472,
          22028
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos5_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65490,
          22028
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos5_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65768.528,
          22028
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos5_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          66047.056,
          22028
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos5_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          64932.944,
          22306.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos5_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65211.472,
          22306.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos5_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65490,
          22306.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos5_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65768.528,
          22306.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos5_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          66047.056,
          22306.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos5_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          64932.944,
          22585.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos5_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65211.472,
          22585.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos5_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65490,
          22585.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos5_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65768.528,
          22585.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos5_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          66047.056,
          22585.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos5_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          64795.944,
          3179.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos6_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65074.472,
          3179.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos6_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65353,
          3179.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos6_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65631.528,
          3179.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos6_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65910.056,
          3179.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos6_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          64795.944,
          3458.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos6_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65074.472,
          3458.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos6_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65353,
          3458.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos6_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65631.528,
          3458.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos6_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65910.056,
          3458.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos6_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          64795.944,
          3737
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos6_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65074.472,
          3737
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos6_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65353,
          3737
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos6_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65631.528,
          3737
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos6_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65910.056,
          3737
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos6_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          64795.944,
          4015.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos6_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65074.472,
          4015.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos6_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65353,
          4015.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos6_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65631.528,
          4015.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos6_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65910.056,
          4015.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos6_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          64795.944,
          4294.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos6_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65074.472,
          4294.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos6_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65353,
          4294.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos6_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65631.528,
          4294.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos6_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65910.056,
          4294.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos6_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64134.944,
          -2228.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos7_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64413.472,
          -2228.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos7_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64692,
          -2228.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos7_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64970.528,
          -2228.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos7_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          65249.056,
          -2228.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos7_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64134.944,
          -1949.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos7_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64413.472,
          -1949.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos7_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64692,
          -1949.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos7_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64970.528,
          -1949.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos7_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          65249.056,
          -1949.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos7_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64134.944,
          -1671
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos7_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64413.472,
          -1671
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos7_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64692,
          -1671
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos7_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64970.528,
          -1671
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos7_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          65249.056,
          -1671
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos7_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64134.944,
          -1392.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos7_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64413.472,
          -1392.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos7_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64692,
          -1392.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos7_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64970.528,
          -1392.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos7_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          65249.056,
          -1392.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos7_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64134.944,
          -1113.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos7_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64413.472,
          -1113.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos7_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64692,
          -1113.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos7_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64970.528,
          -1113.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos7_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          65249.056,
          -1113.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos7_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -525.056,
          -5758.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos8_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -246.528,
          -5758.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos8_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          32,
          -5758.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos8_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          310.528,
          -5758.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos8_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          589.056,
          -5758.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos8_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -525.056,
          -5479.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos8_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -246.528,
          -5479.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos8_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          32,
          -5479.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos8_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          310.528,
          -5479.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos8_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          589.056,
          -5479.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos8_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -525.056,
          -5201
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos8_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -246.528,
          -5201
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos8_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          32,
          -5201
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos8_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          310.528,
          -5201
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos8_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          589.056,
          -5201
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos8_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -525.056,
          -4922.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos8_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -246.528,
          -4922.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos8_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          32,
          -4922.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos8_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          310.528,
          -4922.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos8_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          589.056,
          -4922.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos8_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -525.056,
          -4643.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos8_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -246.528,
          -4643.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos8_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          32,
          -4643.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos8_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          310.528,
          -4643.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos8_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          589.056,
          -4643.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos8_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -398.056,
          95.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos9_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -119.528,
          95.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos9_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          159,
          95.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos9_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          437.528,
          95.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos9_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          716.056,
          95.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos9_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -398.056,
          374.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos9_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -119.528,
          374.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos9_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          159,
          374.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos9_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          437.528,
          374.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos9_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          716.056,
          374.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos9_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -398.056,
          653
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos9_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -119.528,
          653
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos9_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          159,
          653
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos9_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          437.528,
          653
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos9_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          716.056,
          653
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos9_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -398.056,
          931.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos9_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -119.528,
          931.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos9_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          159,
          931.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos9_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          437.528,
          931.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos9_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          716.056,
          931.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos9_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -398.056,
          1210.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos9_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -119.528,
          1210.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos9_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          159,
          1210.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos9_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          437.528,
          1210.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos9_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          716.056,
          1210.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos9_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          -100.056,
          19586.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos10_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          178.472,
          19586.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos10_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          457,
          19586.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos10_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          735.528,
          19586.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos10_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          1014.056,
          19586.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos10_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          -100.056,
          19865.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos10_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          178.472,
          19865.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos10_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          457,
          19865.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos10_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          735.528,
          19865.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos10_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          1014.056,
          19865.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos10_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          -100.056,
          20144
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos10_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          178.472,
          20144
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos10_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          457,
          20144
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos10_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          735.528,
          20144
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos10_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          1014.056,
          20144
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos10_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          -100.056,
          20422.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos10_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          178.472,
          20422.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos10_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          457,
          20422.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos10_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          735.528,
          20422.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos10_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          1014.056,
          20422.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos10_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          -100.056,
          20701.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos10_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          178.472,
          20701.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos10_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          457,
          20701.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos10_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          735.528,
          20701.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos10_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          1014.056,
          20701.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos10_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          333.944,
          24663.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos11_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          612.472,
          24663.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos11_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          891,
          24663.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos11_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1169.528,
          24663.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos11_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1448.056,
          24663.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos11_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          333.944,
          24942.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos11_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          612.472,
          24942.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos11_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          891,
          24942.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos11_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1169.528,
          24942.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos11_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1448.056,
          24942.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos11_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          333.944,
          25221
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos11_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          612.472,
          25221
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos11_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          891,
          25221
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos11_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1169.528,
          25221
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos11_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1448.056,
          25221
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos11_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          333.944,
          25499.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos11_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          612.472,
          25499.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos11_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          891,
          25499.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos11_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1169.528,
          25499.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos11_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1448.056,
          25499.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos11_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          333.944,
          25778.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos11_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          612.472,
          25778.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos11_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          891,
          25778.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos11_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1169.528,
          25778.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos11_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1448.056,
          25778.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos11_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7428.944,
          27951.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos12_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7707.472,
          27951.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos12_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7986,
          27951.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos12_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8264.528,
          27951.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos12_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8543.056,
          27951.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos12_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7428.944,
          28230.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos12_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7707.472,
          28230.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos12_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7986,
          28230.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos12_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8264.528,
          28230.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos12_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8543.056,
          28230.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos12_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7428.944,
          28509
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos12_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7707.472,
          28509
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos12_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7986,
          28509
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos12_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8264.528,
          28509
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos12_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8543.056,
          28509
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos12_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7428.944,
          28787.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos12_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7707.472,
          28787.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos12_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7986,
          28787.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos12_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8264.528,
          28787.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos12_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8543.056,
          28787.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos12_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7428.944,
          29066.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos12_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7707.472,
          29066.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos12_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7986,
          29066.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos12_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8264.528,
          29066.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos12_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8543.056,
          29066.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos12_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8346.944,
          22161.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos13_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8625.472,
          22161.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos13_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8904,
          22161.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos13_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9182.528,
          22161.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos13_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9461.056,
          22161.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos13_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8346.944,
          22440.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos13_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8625.472,
          22440.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos13_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8904,
          22440.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos13_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9182.528,
          22440.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos13_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9461.056,
          22440.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos13_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8346.944,
          22719
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos13_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8625.472,
          22719
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos13_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8904,
          22719
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos13_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9182.528,
          22719
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos13_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9461.056,
          22719
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos13_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8346.944,
          22997.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos13_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8625.472,
          22997.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos13_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8904,
          22997.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos13_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9182.528,
          22997.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos13_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9461.056,
          22997.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos13_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8346.944,
          23276.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos13_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8625.472,
          23276.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos13_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8904,
          23276.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos13_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9182.528,
          23276.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos13_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9461.056,
          23276.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos13_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7541.944,
          4146.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos14_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7820.472,
          4146.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos14_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8099,
          4146.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos14_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8377.528,
          4146.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos14_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8656.056,
          4146.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos14_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7541.944,
          4425.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos14_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7820.472,
          4425.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos14_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8099,
          4425.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos14_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8377.528,
          4425.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos14_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8656.056,
          4425.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos14_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7541.944,
          4704
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos14_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7820.472,
          4704
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos14_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8099,
          4704
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos14_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8377.528,
          4704
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos14_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8656.056,
          4704
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos14_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7541.944,
          4982.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos14_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7820.472,
          4982.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos14_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8099,
          4982.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos14_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8377.528,
          4982.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos14_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8656.056,
          4982.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos14_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7541.944,
          5261.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos14_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7820.472,
          5261.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos14_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8099,
          5261.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos14_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8377.528,
          5261.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos14_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8656.056,
          5261.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos14_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8461.944,
          -1982.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos15_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8740.472,
          -1982.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos15_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9019,
          -1982.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos15_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9297.528,
          -1982.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos15_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9576.056,
          -1982.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos15_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8461.944,
          -1703.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos15_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8740.472,
          -1703.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos15_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9019,
          -1703.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos15_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9297.528,
          -1703.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos15_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9576.056,
          -1703.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos15_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8461.944,
          -1425
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos15_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8740.472,
          -1425
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos15_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9019,
          -1425
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos15_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9297.528,
          -1425
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos15_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9576.056,
          -1425
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos15_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8461.944,
          -1146.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos15_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8740.472,
          -1146.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos15_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9019,
          -1146.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos15_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9297.528,
          -1146.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos15_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9576.056,
          -1146.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos15_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8461.944,
          -867.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos15_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8740.472,
          -867.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos15_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9019,
          -867.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos15_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9297.528,
          -867.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos15_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9576.056,
          -867.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos15_004_004",
      "GridRowIndex": 4
    }
  ],
  "Interval_ms": 0,
  "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
  "UserName": "Nikon",
  "Depth": 2,
  "PixelType": "GRAY16",
  "Time": "2019-12-16 08:35:33 -0500",
  "Date": "2019-12-16",
  "z-step_um": 1,
  "MetadataVersion": 10,
  "PositionIndex": 380,
  "SlicesFirst": true,
  "ChContrastMin": [
    0,
    0,
    0,
    0,
    0
  ],
  "Width": 2048,
  "PixelAspect": 1,
  "MicroManagerVersion": "1.4.23 20190321",
  "ROI": [
    0,
    0,
    2048,
    2048
  ],
  "ChNames": [
    "Il-G",
    "Il-T",
    "Il-A",
    "Il-C",
    "P-DIC"
  ],
  "IJType": 1,
  "GridRow": 0,
  "Comment": "",
  "Height": 2048,
  "GridColumn": 0,
  "Prefix": "geneseq_1",
  "PixelSize_um": 0.16,
  "Frames": 1,
  "CameraTimeout": 20000,
  "BitDepth": 16,
  "KeepShutterOpenChannels": false,
  "Source": "Micro-Manager",
  "Channels": 5,
  "ComputerName": "ZadorConfocal1",
  "CustomIntervals_ms": [],
  "KeepShutterOpenSlices": false,
  "ChColors": [
    -13369345,
    -256,
    -52225,
    -1,
    -1
  ],
  "TimeFirst": false,
  "ChContrastMax": [
    65536,
    65536,
    65536,
    65536,
    65536
  ],
  "Positions": 400,
  "Directory": "F:\\20191216M1cdhs"
},
"FrameKey-0-0-0": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "7bc837a0-b0d3-4a2e-bffc-cd148d09ba63",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 0,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 0,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18789205,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_000.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 95,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:33 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-1": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "39b82faf-7c09-4634-ba1a-13a535c40d4e",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 1,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 1,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18789480,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_001.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 96,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:34 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-2": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "dba25736-9d45-46e1-80b9-6eb736289812",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 2,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 2,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18789757,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_002.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 97,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:34 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-3": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "094af3cc-f81f-40ce-a785-cf47c7b9b255",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 3,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 3,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18790033,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_003.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 98,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:34 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-4": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "028f2395-8ef8-4ab9-98bc-187692fa1a19",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 4,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 4,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18790309,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_004.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 99,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:35 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-5": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "869588c4-92b3-474c-bf8f-d28cab5efec8",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 5,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 5,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18790586,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_005.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 100,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:35 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-6": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "5cf94b4e-8f65-42ee-99a8-e4846947199f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 6,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 6,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18790865,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_006.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 101,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:35 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-7": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "12e843d3-49c1-408b-a986-26d608c49063",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 7,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 7,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18791141,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_007.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 102,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:35 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-8": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "0f0fd5cd-5c27-43e1-86d9-3133a8d51da4",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 8,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 8,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18791417,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_008.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 103,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:36 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-9": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "e856f2f3-d889-4fd3-99a9-9263860d0ec0",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 9,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 9,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18791692,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_009.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 104,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:36 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-10": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "81886fbf-e4fb-4c1c-9362-7aab5cc36598",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 10,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 10,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18791969,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_010.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 105,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:36 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-11": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "7b063255-87bb-45db-9307-59a9bee5e575",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 11,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 11,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18792246,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_011.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 106,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:37 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-12": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "70ba309d-e737-4785-baa8-d08dc5ea7dbe",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 12,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 12,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18792525,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_012.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 107,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:37 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-13": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "f65101dd-ef40-47fa-a69e-10623569d45d",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 13,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 13,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18792842,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_013.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 108,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:37 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-14": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ea1258dd-7aa9-4b30-803e-a007fec17efd",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 14,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 14,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18793121,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_014.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 109,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:37 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-15": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 0,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "605d664d-fe1f-4505-820c-f3f1961ae022",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 15,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 15,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18793396,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_015.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 110,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:38 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-16": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "6640fcd1-1820-4917-9325-84929a8738ee",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 16,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 16,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18793674,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_016.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 111,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:38 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-17": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "dcfa820a-8c56-4c69-9991-29e4df61c0b0",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 17,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 17,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18793950,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_017.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 112,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:38 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-18": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "069395a7-38d6-4885-85d4-b3c4f0e1b515",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 18,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 18,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18794225,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_018.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 113,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:39 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-19": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "dee2de61-5973-42ba-b9ff-a2041a5b015e",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 19,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 19,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18794501,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_019.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 114,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:39 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-20": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "0fa8d26d-3af2-46b0-8512-f6181ee19f5a",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 20,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 20,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18794777,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_020.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 115,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:39 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-21": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "93772e96-84db-47a5-9d7c-3ba4a3c4bf47",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 21,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 21,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18795056,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_021.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 116,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:39 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-22": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "a0bf58e4-1334-499b-b8a6-bb01cb39b5bf",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 22,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 22,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18795332,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_022.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 117,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:40 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-23": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "d0ae0101-84f3-4652-9c98-16cabc7376d4",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 23,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 23,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18795611,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_023.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 118,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:40 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-24": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "bcbca9c6-3a53-4a7c-a44a-f0616def57d3",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 24,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 24,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18795888,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_024.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 119,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:40 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-25": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "761e0ed4-b055-48f1-88ce-a978e4601edf",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 25,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 25,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18796166,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_025.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 120,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:40 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-26": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "d9cc7b0f-eb8e-4751-80ce-4fad93ab8f4a",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 26,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 26,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18796445,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_026.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 121,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:41 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-27": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "95e27587-75a6-4540-8722-bd192be7b89e",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 27,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 27,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18796720,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_027.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 122,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:41 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-28": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "8b623d2f-7df4-4f79-aa1f-875ddca0830f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 28,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 28,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18796996,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_028.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 123,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:41 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-29": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "e4f089a1-22b1-4030-8dc8-7bc3e56ee1ff",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 29,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 29,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18797272,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_029.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 124,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:42 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-30": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "5565a84f-4c68-42e6-b3cc-c64c5104620f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 30,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 30,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18797550,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_030.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 125,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:42 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-0": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "c1b72b4e-d63b-417f-8545-e56ddbd4f884",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 0,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 0,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18798476,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_000.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 95,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:43 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-1": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "4ed3fd9b-40ac-48f4-8176-465fa970f568",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 1,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 1,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18798640,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_001.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 96,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:43 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-2": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "7145345c-73e3-41d9-be73-a62798c3a830",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 2,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 2,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18798806,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_002.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 97,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:43 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-3": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "057b69f8-817d-4032-9b5b-5adad062285f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 3,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 3,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18798972,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_003.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 98,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:43 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-4": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "df209c75-8304-463a-b2d5-9f8e02c0f504",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 4,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 4,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18799136,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_004.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 99,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:43 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-5": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "f1b10ef8-9e39-4de4-9a56-6f07a030cb01",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 5,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 5,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18799303,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_005.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 100,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:44 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-6": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "327d81c2-5bbf-428c-8fe2-bc04a2441bc3",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 6,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 6,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18799470,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_006.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 101,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:44 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-7": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "8cd7d9d0-de37-4693-9985-e37ff3b144df",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 7,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 7,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18799636,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_007.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 102,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:44 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-8": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "717a8a5d-dcf1-4199-8cdc-8cc291e717d7",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 8,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 8,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18799802,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_008.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 103,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:44 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-9": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "5feb4eec-e382-4956-83a6-126dbe90cd77",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 9,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 9,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18799985,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_009.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 104,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:44 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-10": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "076200ae-b940-4a8b-aa33-f0233f37cbad",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 10,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 10,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18800150,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_010.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 105,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:44 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-11": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "36c855f2-1e00-4284-96cd-a4b6eb0f462f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 11,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 11,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18800315,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_011.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 106,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:45 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-12": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ab6fc655-a74c-4e4e-997f-373fb3f3404f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 12,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 12,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18800482,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_012.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 107,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:45 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-13": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "73c724b8-91a0-4ad9-b30e-82c9591d7469",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 13,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 13,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18800648,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_013.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 108,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:45 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-14": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "64ae7280-75f3-453c-96ca-5d364edff3c8",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 14,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 14,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18800812,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_014.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 109,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:45 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-15": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 0,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "f8307dad-817f-4da4-8d73-f72b2cc8d530",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 15,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 15,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18800977,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_015.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 110,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:45 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-16": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ff835579-ac51-4679-baf1-95ebaf41d95e",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 16,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 16,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18801144,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_016.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 111,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:45 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-17": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "0b1e6809-2165-4e4e-b1c7-14e9650e254a",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 17,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 17,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18801310,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_017.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 112,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:46 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-18": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "c373a799-8b8f-43fe-baf2-eb1fe8d74d96",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 18,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 18,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18801475,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_018.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 113,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:46 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-19": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ac968348-1b9e-4e3a-88e3-dcee93306270",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 19,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 19,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18801642,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_019.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 114,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:46 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-20": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "970d3d67-d055-4c50-8e86-8839cd9f75b5",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 20,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 20,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18801811,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_020.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 115,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:46 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-21": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "25d0e9b0-7bb0-42f8-846c-458780cfb6c9",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 21,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 21,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18801976,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_021.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 116,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:46 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-22": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "67547e6a-c3bf-4117-a4f7-57a7c92558d7",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 22,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 22,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18802142,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_022.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 117,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:46 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-23": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "8e0195e5-7b9a-4992-909f-bceee3e095b2",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 23,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 23,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18802308,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_023.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 118,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:47 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-24": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "a5b292bf-b3a3-4dac-b100-7b07b530e8f0",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 24,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 24,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18802472,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_024.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 119,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:47 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-25": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "5a338b48-2635-40bf-ba6c-1f1a96a09ef2",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 25,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 25,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18802651,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_025.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 120,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:47 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-26": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "11f2b05a-f367-4c4b-902d-b0896de665a6",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 26,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 26,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18802816,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_026.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 121,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:47 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-27": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "cd8dc355-6768-42fa-87cb-325a88c398a7",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 27,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 27,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18802984,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_027.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 122,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:47 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-28": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "1484a957-13ce-4ec9-811e-0efccd9c24ac",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 28,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 28,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18803151,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_028.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 123,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:47 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-29": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "6a742f78-8ae4-4129-8e07-0c8ed23e39d6",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 29,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 29,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18803318,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_029.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 124,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:48 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-30": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "5fc8a7a1-36cd-47dd-9579-e473e2747a2c",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 30,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 30,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18803485,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_030.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 125,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:48 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-0": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "76b7d76b-3f3d-4d51-836e-a6517d2e3058",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 0,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 0,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18804452,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_000.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 95,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:49 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-1": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "29d7b8ae-fd3b-4030-92d6-e74a3d15dbe3",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 1,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 1,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18804716,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_001.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 96,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:49 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-2": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "c52a51f9-038e-4d2c-901a-0458604376ed",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 2,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 2,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18804982,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_002.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 97,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:49 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-3": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "22e7afa0-75f0-4aae-8c21-fe7d0804e8a9",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 3,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 3,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18805249,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_003.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 98,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:50 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-4": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "69a81782-c891-4800-9a7d-9e103d225e3e",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 4,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 4,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18805515,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_004.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 99,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:50 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-5": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "1e288a70-ec19-41af-95d8-65adad808c56",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 5,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 5,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18805781,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_005.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 100,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:50 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-6": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "20c64b67-7c88-4f8c-bded-973e279426cd",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 6,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 6,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18806046,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_006.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 101,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:50 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-7": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "5edceab2-cfc5-4d3c-b1ce-add0367950b0",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 7,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 7,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18806311,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_007.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 102,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:51 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-8": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "733d2a3d-2d0e-4754-8e66-ede14d1a9ff6",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 8,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 8,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18806576,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_008.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 103,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:51 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-9": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "fb8d40e4-bf63-4f25-baed-0a5fa410f0b6",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 9,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 9,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18806842,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_009.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 104,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:51 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-10": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "38cfd4e6-aaed-405f-a6ad-64a5e0a23228",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 10,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 10,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18807111,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_010.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 105,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:51 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-11": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ceb592bb-b6fa-4cdc-ad95-6a0df41eb476",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 11,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 11,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18807377,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_011.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 106,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:52 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-12": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "fab8cce5-3a5c-4cfa-b600-40e64580481c",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 12,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 12,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18807643,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_012.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 107,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:52 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-13": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "9beed990-0060-4a75-80af-9bc5a22b20df",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 13,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 13,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18807909,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_013.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 108,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:52 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-14": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "fec09a4c-8eb2-4657-a77e-78804223d5b8",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 14,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 14,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18808174,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_014.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 109,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:52 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-15": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 0,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "69608204-c0e6-4444-88f7-0f57ffc29f94",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 15,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 15,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18808442,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_015.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 110,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:53 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-16": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "3be85884-7742-4d06-9025-1994098c2a02",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 16,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 16,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18808710,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_016.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 111,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:53 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-17": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "2c326948-3ce1-420f-b436-00b007414389",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 17,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 17,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18808976,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_017.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 112,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:53 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-18": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "9ded2d99-7232-4737-a3c3-5a8ff93e44fc",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 18,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 18,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18809242,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_018.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 113,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:54 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-19": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "5442ff5f-1388-403d-b2bc-65d7a881cb47",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 19,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 19,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18809507,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_019.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 114,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:54 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-20": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "57f76ccf-dca0-49c6-a380-3b8dbad2b038",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 20,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 20,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18809772,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_020.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 115,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:54 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-21": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "7dfd1815-37a7-4a50-9564-c3e244ac5997",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 21,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 21,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18810042,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_021.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 116,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:54 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-22": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "70f763e9-4776-4cd9-a9f0-24507baa28f0",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 22,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 22,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18810307,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_022.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 117,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:55 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-23": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "e1d79f08-0425-4e00-9ebd-f4a545d5dc94",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 23,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 23,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18810572,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_023.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 118,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:55 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-24": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "8279fc4c-b885-4716-8cb3-6a76cb8c8357",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 24,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 24,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18810838,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_024.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 119,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:55 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-25": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "fd8ce4cc-3ad9-47e0-8ec0-68ef5aef5e6e",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 25,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 25,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18811106,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_025.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 120,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:55 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-26": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "58cbdcdf-cbd1-44a8-9f2e-3b7625fc4515",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 26,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 26,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18811372,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_026.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 121,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:56 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-27": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "bde68eb1-d156-4ac1-ab13-98df3e4d38ce",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 27,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 27,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18811637,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_027.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 122,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:56 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-28": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "2860370d-a52c-421e-976c-1cda4613969d",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 28,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 28,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18811905,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_028.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 123,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:56 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-29": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "aefd8375-ae0d-4efd-93cc-101c1d6ddb9f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 29,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 29,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18812171,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_029.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 124,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:56 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-30": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b6690928-3ef3-4a44-89c2-7fff2f17a188",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 30,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 30,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18812450,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_030.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 125,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:57 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-0": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "90a04105-8e3a-49e3-adea-161176316b98",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 0,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 0,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18813070,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_000.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 95,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:57 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-1": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "47e76525-ad34-4e6a-a8da-a885f1070e56",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 1,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 1,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18813407,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_001.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 96,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:58 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-2": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "c364afd0-3842-49c4-8dd1-8e51b3b3642f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 2,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 2,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18813757,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_002.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 97,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:58 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-3": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "3d8756b9-1bf1-4b21-8bf3-645a587f82ff",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 3,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 3,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18814092,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_003.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 98,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:58 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-4": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "0f59dbe3-3317-47d2-b4e8-041a0b3e8bee",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 4,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 4,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18814429,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_004.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 99,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:59 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-5": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "f40e9b24-6d03-40ff-859c-3a81a9e9718c",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 5,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 5,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18814765,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_005.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 100,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:59 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-6": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "79984654-91b4-4959-94e7-5852b7cf2e25",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 6,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 6,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18815101,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_006.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 101,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:35:59 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-7": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "7152ae0d-5d99-47a6-ae2b-4aa4dcabdc35",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 7,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 7,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18815438,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_007.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 102,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:00 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-8": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "5ba4e582-6a3b-416d-9c14-26c0bcc6d41a",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 8,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 8,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18815773,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_008.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 103,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:00 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-9": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ea82f0ad-6295-4fa6-a3f6-e51ad4cdf7d3",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 9,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 9,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18816118,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_009.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 104,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:00 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-10": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "fd83447f-e4fd-4460-9a40-42922fd9b5f3",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 10,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 10,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18816453,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_010.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 105,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:01 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-11": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "1d72953e-c8e8-4b41-9545-e0cd7ab2ea22",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 11,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 11,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18816788,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_011.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 106,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:01 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-12": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "7b1368ed-425e-4810-ab94-4ca800626254",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 12,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 12,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18817132,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_012.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 107,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:01 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-13": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "0dcddb44-a217-4fe4-a464-54566ca75322",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 13,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 13,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18817467,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_013.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 108,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:02 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-14": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b10ca1c1-2784-47d1-9f6f-d65fedb0bab0",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 14,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 14,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18817801,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_014.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 109,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:02 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-15": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 0,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "68a24562-1578-4cb4-9b59-4439e1a90def",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 15,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 15,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18818136,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_015.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 110,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:02 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-16": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "f0182c0c-ae0e-4561-ba1f-8a5d79250ab4",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 16,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 16,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18818471,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_016.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 111,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:03 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-17": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "a1f53726-f6af-4ae5-aee4-f2c062706bd1",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 17,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 17,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18818808,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_017.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 112,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:03 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-18": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ef89d385-6462-4685-9c4e-ccebfe32b412",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 18,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 18,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18819144,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_018.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 113,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:03 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-19": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "22c6fba4-d20a-472c-b459-6798c914f753",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 19,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 19,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18819479,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_019.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 114,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:04 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-20": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "fa78d134-047f-49b3-8225-7c328c29be22",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 20,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 20,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18819815,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_020.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 115,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:04 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-21": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b46afc23-8517-4cdc-9977-51f6c1ab5062",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 21,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 21,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18820151,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_021.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 116,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:04 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-22": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "5332557b-12f3-4770-8773-a034807d7fce",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 22,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 22,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18820486,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_022.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 117,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:05 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-23": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "4ca3396c-0666-453a-90db-ee785e2fdf6d",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 23,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 23,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18820821,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_023.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 118,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:05 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-24": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "13cb227b-a3c1-48e8-9c14-d82750f60925",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 24,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 24,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18821169,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_024.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 119,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:05 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-25": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "5fc19c52-5584-413e-b2fd-edf1f794a013",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 25,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 25,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18821504,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_025.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 120,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:06 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-26": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "3c9c901d-a869-4909-82b9-074176e68ca4",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 26,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 26,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18821840,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_026.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 121,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:06 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-27": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "eb15c590-0849-4305-bd42-06827bd0f130",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 27,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 27,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18822177,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_027.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 122,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:06 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-28": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "d65be6e4-1d9a-430d-b088-e1f7209eadf1",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 28,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 28,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18822512,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_028.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 123,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:07 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-29": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "57dae707-a9ad-4570-867e-2d0109d24d23",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 29,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 29,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18822848,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_029.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 124,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:07 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-30": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "904fc0e6-9c96-46bc-9dd4-11999e84493b",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 30,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 30,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18823186,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_030.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 125,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:07 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-0": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "e5cde9c3-b614-483e-ab5c-ef91d8d9df6b",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 0,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 0,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18824301,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_000.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 95,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:09 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-1": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "f976ef42-d64e-4707-8d6d-e18ebc0c0080",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 1,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 1,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18824731,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_001.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 96,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:09 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-2": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "08e420c0-8716-4b1d-adf4-27df4ea52039",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 2,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 2,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18825179,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_002.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 97,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:09 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-3": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "7d45dc40-f3fc-4806-8896-0cef3a4ffdb2",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 3,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 3,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18825614,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_003.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 98,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:10 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-4": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "df802216-de29-4995-ae62-7726952884a0",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 4,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 4,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18826042,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_004.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 99,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:10 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-5": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "0b4768ef-8312-4394-9a59-6027692a658d",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 5,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 5,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18826474,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_005.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 100,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:11 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-6": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "efaa4efc-0c17-473b-b776-ddd8afcf7508",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 6,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 6,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18826923,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_006.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 101,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:11 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-7": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "28f15bbf-b497-46af-9f6d-1863c2b16731",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 7,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 7,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18827338,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_007.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 102,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:12 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-8": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "c1f57319-e255-4fb6-8d23-eb7de584f0e8",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 8,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 8,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18827787,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_008.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 103,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:12 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-9": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "95050c4c-00c9-4e08-9e83-c9c35ef2deaa",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 9,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 9,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18828219,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_009.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 104,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:13 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-10": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "831df807-26a6-48bf-ae27-b728467bbf02",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 10,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 10,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18828650,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_010.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 105,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:13 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-11": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "8947d776-35e0-427c-aaf5-c4e7a76bfe4d",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 11,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 11,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18829099,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_011.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 106,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:13 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-12": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "cd7ed44b-834d-40a0-8acd-30bd1c6cf446",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 12,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 12,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18829530,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_012.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 107,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:14 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-13": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "2b25461f-1744-470d-91ce-b9d4549f36c0",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 13,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 13,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18829947,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_013.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 108,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:14 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-14": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "3aa8504f-8fd3-49d0-a802-120312c53639",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 14,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 14,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18830394,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_014.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 109,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:15 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-15": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 0,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "09e03a01-8451-4252-8eab-c7bfdb98c1bf",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 15,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 15,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18830825,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_015.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 110,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:15 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-16": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "4280bbc2-c229-4b56-be6a-bf9c8744a0fc",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 16,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 16,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18831258,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_016.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 111,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:16 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-17": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "9c8c2692-4eab-4200-a2db-0f1959edc956",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 17,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 17,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18831690,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_017.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 112,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:16 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-18": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "bdfbdd48-57d5-4766-b99d-89fdec6a6869",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 18,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 18,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18832122,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_018.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 113,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:16 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-19": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "364c095e-31ff-49d8-a829-c5c751e83f11",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 19,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 19,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18832555,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_019.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 114,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:17 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-20": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "fb6b50d9-afaa-4288-9396-da665d9a8a26",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 20,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 20,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18832988,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_020.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 115,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:17 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-21": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "7907c761-be77-4a09-bb17-bf4f2e4243c7",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 21,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 21,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18833417,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_021.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 116,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:18 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-22": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "fc6e45f2-d51e-4ab8-8ddd-638b2cf9f4a8",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 22,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 22,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18833833,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_022.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 117,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:18 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-23": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "64bfb833-85f1-467d-ad15-94171a23034f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 23,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 23,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18834264,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_023.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 118,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:19 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-24": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "8362de83-3fa7-4c90-9510-b47d51fda4c6",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 24,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 24,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18834696,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_024.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 119,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:19 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-25": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "7c80cea4-375c-424c-b432-b7f0b19b7b77",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 25,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 25,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18835114,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_025.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 120,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:19 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-26": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "16f59516-56f0-4035-9aca-59a5de3d1db4",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 26,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 26,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18835528,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_026.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 121,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:20 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-27": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "d551f668-081a-499b-b00b-1cf299e9fcd1",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 27,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 27,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18835976,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_027.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 122,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:20 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-28": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ea4a6b5c-5862-40d5-96c2-ba855741374b",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 28,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 28,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18836432,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_028.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 123,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:21 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-29": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "d2e0bebd-7841-41d7-8453-522af8367ec1",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 29,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 29,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18836857,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_029.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 124,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:21 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-30": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "44acf79c-2d9d-43f4-93f7-67446df62e3e",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 380,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:35:33 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 380,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 30,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 30,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 18837304,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos15_000_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8461.944,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_030.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 125,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:36:22 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -1703.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
}
}